New Canon `200 mm wafer option` for i-line and KrF semiconductor lithography equipment helps meet th ...
(World News Science)

TOKYO, December 11, 2017-Canon Inc. announced today that the Company has commenced sales of a `200 mm option` for the FPA-5550iZ2 i-line and the FPA-6300ES6a KrF semiconductor lithography equipment, released in December 2016 and April 2012, respectively. These two systems are renowned for their ability to mass-produce logic, memory and image sensor devices required for IoT and automotive technologies. FPA-5550iZ2 FPA-6300ES6a For the production of such semiconductor devices...